- High Brightness Plasma Ion Source
- FIB Aperture Strips
Products
High Brightness Plasma Ion Source
Oregon
Physics' unique high brightness plasma ion source is designed for microprobe
and nanoprobe applications. The radio frequency ion source uses inductive
coupling from an external antenna to produce a high density plasma with
low ion temperature.
Features
- Produces positive ions from a variety of gas species including xenon, argon, oxygen, helium, and hydrogen
- Extremely long life with a cathodeless and sputter free design
- High brightness with a moderate extracted current density and low ion temperature (less than 0.1 electronVolt(eV))
- Low axial energy spread (5-6eV)
- Operates with ground based electronics
- Integrated EMI shielding
- Liquid cooled for low temperature operation
- Integrated sensors and safety interlocks
Oregon Physics, LLC
19075 NW Tanasbourne Dr., Suite 150
• Hillsboro, OR 97124 USA
Phone: 503.601.0041 • Fax: 503-992-6710 • Email: info@oregon-physics.com
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