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Oregon Physics: High Brightness Ion Beams
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Research & Development > Nanoscale FIB Milling

NSF Grant

NSF Grant Performance Targets Experimental Results Technical Publications

We are continually researching new design improvements to increase the performance of our ion beam systems. Research and development work for our next generation plasma source has been underway since the beginning of 2008, funded under a Phase I Small Business Innovation Research (SBIR) grant from the National Science Foundation (NSF). This work is expected to culminate in at least two patents for our next generation source as well as many more applications.

This program is entitled Novel Ion Source for Enhanced Focused Ion Beam Material Removal at the Nano, Micro and Macro-Scales. More details of this work can be found on the National Science Foundation Web site.

 

 

Oregon Physics, LLC
19075 NW Tanasbourne Dr., Suite 150 • Hillsboro, OR 97124  USA
Phone: 503.601.0041 • Fax: 503-992-6710 • Email: info@oregon-physics.com

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